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Track System

- Maximized Throughput

- Easy Main tenance

- Multiple Process

- Faster Delivery

- Built-In Chemical Supply System

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CIS System

- Specialized in CIS Process

- Auto Conversion ( 8", 12" ) Function

-Optimized Software

- SECS / GEM Communication

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OEBR System

- EBR with UV Light Source

- EBR Width : 0.5 ~ 3.0mm Exposure

- Round Mode / Partial Mode

-Stand Alone Type / Unite Type

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Metal Lift Off
System

- Minimized chemical consumption

- Chemical Recycle Function

- Metal Reclaim Funiction

- CO2 Fire Extinguish ( Safety Option )

추상적 인 배경
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