Metal Lift Off System
- Minimized chemical consumption
- Chemical Recycle Function
- Metal Reclaim Funiction
- CO2 Fire Extinguish ( Safety Option )
Model Name
MLO
System
Substrate Size
- 2inch ~ 8-inch
- Flat / Notch
Substrate Material
- Si, Sapphire
System Configuration
- 2-Spin, 3-Spin, 4-Spin
Demension
- W1600 x D1600 x H1980
- Under 8 Inch
Cassette Station
- Uni-Cassette : 2ea
- No-Conversion
Module
Transfer Unit
- 2-Arm Vac Robot sith mapping sensor
- 4-Axis ( R1,R2,T,Z )
Lift Off Module
- High Pressure Nozzle, Max 80℃, Max12MPa
Max 500ml / min, Max 3000rpm
- Metal Mesh
Cleaning Module
- 2-Nozzle ( IPA/D.I ), Back Rinse
Max 1000ml/min, Max Max 3000rpm
Metal Residue
- No metal residue
Chemical Residue
- No Chemical Residue
- inclue PR
Pattern Damagr
- No Pattern Damage
Particle
- under 30ea, edge exclusion 5mm
- over 0.2um particle
